Camfil

 

Excelsiorlaan 67-69
B-1930 Zaventem

Phone:  +32 2 705 80 70
Email: info.be@camfil.com

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Micro-electronics

Are you looking for air filters and clean air solutions for the microelectronics industry? Camfil is your expert for air filtration and dust removal in sensitive production environments.

CLEAN AIR SOLUTIONS FOR THE MICROELECTRONICS INDUSTRY

Microelectronics has a vast array of applications, including:

  • Consumer electronics
  • Industry
  • Medical
  • Multimedia
  • Military
  • Aerospace
  • Telecommunications
  • Automotive industry
  • Etc.

In the microelectronics industry, components are produced that are particularly sensitive to (nano)dust particles and gases such as i.a. ammonia, boron, condensable organic gases, volatile organic compounds, etc. There is then a permanent risk of airborne molecular contamination (AMC).

Think, for example, of electronic components such as printed circuit boards, chips, CDs, DVDs, hard disks, analogue/digital circuits, wafers and semiconductors, etc.

Camfil offers air filtration and dust removal solutions that meet the most stringent standards within the microelectronics industry. These enable you to guarantee the quality of your production.

OUR EXPERTISE

Camfil has more than fifty years’ experience in the microelectronics and semiconductor industry. We are experts in AMC checks that protect the various processes and apparatus in your cleanroom against (nano)particles and gas molecules.

Our specialist molecular R&D centres and our involvement in the International Technology Roadmap for Semiconductors (ITRS) make Camfil the right partner to advise and support you.

We apply the following standards here:

  • SEMI standard F21-1102 for semiconductor production;
  • ITRS (International Technology Roadmap for Semiconductors);
  • ISO 14644-8 (breakdown of AMC classifications).

OUR SOLUTIONS

Within the microelectronics and semiconductor industry, we offer solutions:

  • For the OEMs of process apparatus
  • At the level of the air group for the filtration of fresh outdoor air
  • At the level of the cleanroom/production room for the recirculation of air
  • In the form of integrated solutions at process level
  • In the form of final filtration at production level by means of HEPA/ULPA filtration
  • For dust-generating production facilities (APC = air pollution control)
  • At the level of air extraction

Our solutions consist of:

  • EPA, HEPA and ULPA filters in accordance with EN 1822, possibly with modified filter medium to prevent/reduce outgassing (low boron and diaphragm filters)
  • Combination filters (F7 + activated carbon) and other activated carbon solutions for the fresh air group
  • Ceiling, wall and duct housings (pulsation & extraction) for HEPA/ULPA filters at process level
  • Compressed air-cleaned cartridge filters (APC)
  • Filter fan units (FFU) with HEPA/ULPA filters, possibly combined with AMC filter
  • Integrated or recirculation units with EPA/HEPA filters and possibly activated carbon filters
  • Gas scrubbers for the extraction air

OUR SERVICES

You can rely on us for the following services:

  • Local presence with a sales organisation, warehouse and/or factory
  • Segment managers/specialists – various (PhD) doctors in molecular filtration
  • Engineering tools/software such as CREO, LCC (life cycle cost calculation), CLEAN AMC and CARBON
  • Analysis of activated carbon specimens
  • Sampling and analysis of air specimens
  • Online gas monitoring
  • Specialist molecular laboratory for testing the real performance of filters under real-life conditions (RH, °C, ppb/ppm) with different reference gases

Are you interested in our products or do you have any questions?